- with ANSYS(R) FEM-program for UNIX (DEC-Ultrix, HP-UX) and PC (MS-DOS) workstations
- MEMS-sensors based on silicon with piezoelectric thin-film layers
- and etched quartz crystals (DETF: Double-Ended Tuning Fork)
- piezoelectric simulation of MEMS sensors & actuators
- silicon resonators & actuators (beams, diaphragms, cantilever, etc.)
- with ZnO & AlN piezoelectric thin-film layers for excitation & detection
- hybrid bimorph Si bimorph-structures with PZT ceramics (PoC), Siemens VIBRIT420
- triple-beam force sensors based on silicon / ZnO thin films
- HF-etched quartz crystals with Au electrodes
- use of different quartz cuts
- Double-Ended-Tuning-Fork (DETF)
- https://katalog.slub-dresden.de/id/0-016158210
- https://tfconsult.com/entwurf-und-auslegung-mikromechanischer-strukturen/
- https://tfconsult.com/fe-modellierung-resonanter-sensoren/
- https://tfconsult.com/berechnung-von-quarz-kraftsensoren/
- https://tfconsult.com/piezoelectric-micro-actuators/
- https://tfconsult.com/piezoelectrical-driven-force-sensor/
- https://tfconsult.com/fe-modeling-of-resonant-sensors/
- https://tfconsult.com/microsystems-modeling/
... to be continued !